MAKE A MEME View Large Image LOCOS birds beak DE.svg en Detail cross section at the edge of an isolation windows after a simple LOCOS process The schematic shows partial growth of Silicon dioxide into the silicon substrate and distortion of the silicon nitrite mask ...
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Keywords: LOCOS birds beak DE.svg en Detail cross section at the edge of an isolation windows after a simple LOCOS process The schematic shows partial growth of Silicon dioxide into the silicon substrate and distortion of the silicon nitrite mask because of volume increase under the mask de Schnitt an der Kante eines Isolationsfenster nach einem einfachen LOCOS-Prozess Zusehen ist das teilweise Wachstum in das Silicium-Substrat und die Verbiegung der Siliciumnitritmaske durch die Volumenzunahme auch unter der Maske own Cepheiden 2009-01-21 Thermal oxidation
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